Picosun-Sprinter
Application：
Electronic Assembly
Semiconductor
Main advantages
The PICOSUN® Sprinter ALD system is designed
to disrupt batch ALD production on 300 mm
manufacturing lines in the semiconductor, display, and
IoT component industries. The SEMI S2/S8-certified
PICOSUN® Sprinter combines the leading single-wafer
film quality and uniformity with fast processing, high
throughput, and uncompromising reliability. Thanks
to the fast process times, Sprinter’s thermal budget is
lower than typical vertical furnace reactors commonly
used in batch ALD manufacturing. This makes Sprinter
also ideal for sensitive substrate materials and devices.
Barrier, high-k oxide, and metal films are deposited with
perfect ALD in mass production volumes.